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Probing baloon actuator vacuum & extreme temperatures compatible
·Optical linear encoder 50nm resolution
·Optical linear encoder 50nm resolution
·Speed: > 12mm/s
·Stroke: 60mm
·Accuracy: 0.1µm
·Axial Load : 10 to 50 N
·No Axial backlash
·Operation from -60°C to +60°C (integrated temperature control)
·Operating pressure :down to 1mbarSpeed: > 12mm/s
·Stroke: 60mm
·Accuracy: 0.1µm
·Axial Load : 10 to 50 N
·No Axial backlash
·Operation from -60°C to +60°C (integrated temperature control)
·perating pressure :down to 1mbar
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